蓝宝石基板
富乐达科技可提供2~8英寸标准、非标准、特殊定制规格蓝宝石衬底基板，可用于LED衬底，半导体薄膜材料MOCVD、氮化镓等外延生长。
| 产品详情 | 2英寸蓝宝石基板 | 4英寸蓝宝石基板 |
| 材料 | >99.99%，High Purity,Mono-crystalline Al2O3 (KY) | >99.99%，High Purity,Mono-crystalline Al2O3 (KY) |
| 直径 | 50.8 ± 0.1 mm | 100 ± 0.3 mm |
| 厚度 | 430 ± 25um | 650 ± 25um |
| 晶向 | C Plane [0001] to M (1-100) 0.2°±0.1° C Plane [0001] to M (1-100) 0°±0.1° C Plane [0001] to M (1-100) 1°±0.1° | C Plane [0001] to M (1-100) 0.2°±0.1° C Plane [0001] to M (1-100) 0°±0.1° C Plane [0001] to M (1-100) 1°±0.1° |
| 主定位边 | A-plane (11-20) ± 0.2° | A-plane (11-20) ± 0.2° |
| 主定位边长度 | 16.1±1.0mm | 30.0±1.0mm |
| 正面 | Epi-ready, Ra < 0.3nm | Epi-ready, Ra < 0.3nm |
| 背面 | Ra<1.2um | Ra<1.2um |
| TTV | ≤ 10 um | ≤ 10 um |
| BOW | ≤ 15 um | ≤ 15 um |
| WARP | ≤ 15 um | ≤ 15 um |
