Lithium Tantalate Substrate

Lithium tantalate substrates are mainly used as Q-switches in laser technology, pyroelectric detectors in infrared technology, and filters and resonators in the electronics industry.

FULEDA Technology can provide 2~6 inch substrate, surface coating, substrate cutting and other services.
 

 Item LiTaO3
 Growth method CZ (Czochralski)
 Use for SAW / BAW
 Wafer size 4 inch /  6 inch
 Diameter  100 ± 0.5 /   150 ± 0.5 mm
 Orientation 36º/42º Rotated Y axis  X cut / Z cut
 Thickness 350/500 ± 25um 、500/1000 ± 25um
 OF (Orientation Flat) 32 ± 2 / 47 ± 2 mm
 TTV (um) 10 Max.
 Warp (um) 50 Max..
 Surface-Front side Polished
 Surface-Back side Lapped / Polished