Lithium Tantalate Substrate
Lithium tantalate substrates are mainly used as Q-switches in laser technology, pyroelectric detectors in infrared technology, and filters and resonators in the electronics industry.
FULEDA Technology can provide 2~6 inch substrate, surface coating, substrate cutting and other services.
Item | LiTaO3 | |
Growth method | CZ (Czochralski) | |
Use for | SAW / BAW | |
Wafer size | 4 inch / 6 inch | |
Diameter | 100 ± 0.5 / 150 ± 0.5 mm | |
Orientation | 36º/42º Rotated Y axis | X cut / Z cut |
Thickness | 350/500 ± 25um | 、500/1000 ± 25um |
OF (Orientation Flat) | 32 ± 2 / 47 ± 2 mm | |
TTV (um) | 10 Max. | |
Warp (um) | 50 Max.. | |
Surface-Front side | Polished | |
Surface-Back side | Lapped / Polished |