1~3inch silicon wafer
Fuleda Technology supplies 1~3 inch semiconductor silicon wafers in various resistivity's , orientations and thickness, such as Dummy grade, test grade and product grade silicon wafers;
We also supplies processing service, such as CZ、FZ method, oxide film, nitride film, grinding, thinning, polishing, etc;
Silicon wafers are ideal subsstrate for PVD/CVD/thermal oxidation/nitridation and other coating substrates; magnetron sputtering growth samples; molecular beam epitaxial growth substrates; SEM scanning electron microscope, transmission electron microscope, Atomic force AFM, Raman spectroscopy, infrared spectroscopy, fluorescence spectroscopy, and other analysis and test substrates; X-ray analysis; etching, bonding, optical transmission, lenses, devices, etc.;
Growth method | CZ,MCZ,FZ |
Grade | Prime,Test,Dummy,etc. |
Diameter | 1 2 3 inch/25mm 50mm 75mm |
Thinkness | 50~3000um |
Surface-Finish | As cut,lapped,etched,SSP,DSP,etc |
Orientation | (100)(111)(110)(211),etc. |
Off cut | up to 7 deg |
Type/Dopant | P/B,N/Phos,N/As,N/Sb,intrinsic FZ:up to 20k ohm-cm |
Resistivity | CZ/MCZ:From 0.001 to 1000 ohm-cm |
Thin films | PVD:Al,Cu,Cr,Si,Ni,Fe,Mo.etc, PECBD:Oxide,Nitride,SiC,etc |
Processes | DSP,ultra thin,ultra flat,etc. Downsizing,back grinding,dicing,etc. |