Quartz Wafer


Quartz products (electronic grade quartz products such as quartz wafers and quartz rings) are used as the basic raw materials of semiconductor integrated circuits: the diffusion, oxidation, and etching of silicon wafers in the wafer production process.



 Spec 4inch Quartz Wafer4inch Quartz Wafer
Size 4 inch (100mm±0.1) 6 inch (150.1mm±0.1)
Thickness1mm±0.02mm0.5mm±0.02mm
Flat30±1mm47.5±1mm
Front-sidePolishedPolished
Back-side Polished Polished
TTV ≤ 1 um ≤ 1um
 BOW ≤ 15 um ≤ 15 um