Quartz Wafer
Quartz products (electronic grade quartz products such as quartz wafers and quartz rings) are used as the basic raw materials of semiconductor integrated circuits: the diffusion, oxidation, and etching of silicon wafers in the wafer production process.
Spec | 4inch Quartz Wafer | 4inch Quartz Wafer |
Size | 4 inch (100mm±0.1) | 6 inch (150.1mm±0.1) |
Thickness | 1mm±0.02mm | 0.5mm±0.02mm |
Flat | 30±1mm | 47.5±1mm |
Front-side | Polished | Polished |
Back-side | Polished | Polished |
TTV | ≤ 1 um | ≤ 1um |
BOW | ≤ 15 um | ≤ 15 um |