MEMS
MEMS is a process technology used to create tiby integrated devices or systems that combine mechanical and eletrical componenet . It integrates high-tech technology produced by lithography, corrosion, thin-film, LIGA, silicon micromachining, non-silicon micromachining, engineering, and precision machining. Electromechanical devices.
MEMS are applied to ultra-precision machining, involving many disciplines in microelectronics, materials, mechanics, chemistry, and mechanics. Its disciplines cover the various branches of physics, chemistry, and mechanics such as force, electricity, light, magnetism, sound, and surface at the micro-scale..
Fuleda Technology supplies plate-making services, MEMS process production, and development packaging design, packaging process development services, and can also supply customers MEMS products with double-sided lithography, DRIE, Bonging, and other process services.
| Spin Processes | Provide Thin/Thick gluing process of positive or negative glues; |
| UV Lithography | Periodic grating with a minimum linewidth of 2um |
| Etching Process | Deep silicon etching silicon dioxide etching; metal etching etc; |
| Electron Beam Lithography | Nano electrode, preparation process of nano structure; |
| Coating | 1.Metal coating magnetron sputtering,ion beam sputtering,themal evaporation; 2.Passivation film:oxide film, PECVD, LPCVD; 3.Optical film: feflection film, antireflection film; |
| Plating Process | Provide metal mold preparation |
| Cutting Process | Laser cutting, invisible cutting and perforation |
| Nano-Photonics Divices | 1.EBL exposure and etching technology can process high quality nano photon devices 2.Mature processing ability of photon devices based on SU8 polymer materrals. 3.Mature processing ability of silicon nirtrde photonic devices. 4.All of the above devices can be amde into matched metal electrodes.. |
