SIN Film Wafer


Nitride film (SIN) silicon wafers can increase the strength of single crystals, prevent silicon wafers from warping, 

and inhibit the formation of micro-defects.


 MethodPRCVD / PECVD
 Dismeter 1″ / 2″ /  3″ /  4″ /  6″ inch
TypeN-Type / P-Type / Intrinsic
Resisivity CZ/MCZ:From 0.001 to 1000 ohm-cm

FZ:up to 20k ohm-cm

 Thickness50~3000um
 SIN Film Thickness 50~1000nm
Surface Single Side SIN Film / Double Side SIN Film