Metal Film Wafer
Metal film silicon wafers are mainly used in ohmic contacts, conductive substrates, scanning electron microscopes, atomic force microscopes, and nanomaterials.
Fuleda Technology supplies services such as spot metal film silicon wafers and customized processing.
Process | Magnetron Sputtering、Evaporation、Electroplating |
Diameter | 1″ / 2″ / 3″ / 4″ / 6″ inch |
Orientation | 110、110、111 etc |
Type | N-Type、 P-Type、 Intrinsic |
Resistivity | CZ/MCZ:From 0.001 to 1000 ohm-cm FZ:up to 20k ohm-cm |
Film Thickness | 10~1000nm |
Metal | Au、Pt、Al、Cu、Ni、Ag etc |
Structure | Substrate+Ti、Cr、Ni+Coating Film |
Other Substrate | Quarte / Lithium Niobate / Glass etc |